Defect Inspection | KLA

The Surfscan® unpatterned wafer inspection systems identify defects and surface quality issues that affect the performance and reliability of semiconductor ... Byusingthissite,youagreetoourupdatedPrivacyPolicyandourCookiePolicy. CookieSettings IAccept Close CookieSettings Thiswebsiteusescookiestoimproveyourexperiencewhileyounavigatethroughthewebsite.Outofthesecookies,thecookiesthatarecategorizedasnecessaryarestoredonyourbrowserastheyareessentialfortheworkingofbasicfunctionalitiesofthewebsite.Wealsousethird-partycookiesthathelpusanalyzeandunderstandhowyouusethiswebsite.Thesecookieswillbestoredinyourbrowseronlywithyourconsent.Youalsohavetheoptiontoopt-outofthesecookies.Butoptingoutofsomeofthesecookiesmayhaveaneffectonyourbrowsingexperience. Essential AlwaysEnabled Essentialcookieshelpthewebsitefunctionbyenablingfunctionalityandrememberinguserchoices.Thewebsitewillnotfunctionproperlywithoutthem. 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ContactUs Surfscan®Series UnpatternedWaferDefectInspectionSystems TheSurfscan® unpatternedwaferinspectionsystemsidentifydefectsandsurfacequalityissuesthataffecttheperformanceandreliabilityofsemiconductordevices.ItsupportsIC,OEM,materialsandsubstratemanufacturingbyqualifyingandmonitoringtools,processesandmaterials,byquicklyisolatingsurfacedefects. ApplicationsProcessqualification,Toolqualification,Toolmonitoring,Outgoingwaferqualitycontrol,Incomingwaferqualitycontrol,Resistandscannerqualification,Processdebug.RelatedProductsSurfscanSP2XP: Unpatternedwaferinspectionsystemtargetedfortechnologies≥45nmdesignnode. Downloadbrochure. SurfscanSP2: Unpatternedwaferinspectionsystemtargetedfortechnologies≥65nmdesignnode. Downloadbrochure. SurfscanSP1DLSPro: Unpatternedwaferinspectionsystemtargetedfortechnologies≥90nmdesignnode. Downloadbrochure. SurfscanSP1TBIPro: Unpatternedwaferinspectionsystemtargetedfortechnologies≥130nmdesignnode. Downloadbrochure. Interestedinthisproductorhavequestions? ContactUs ShowDetails 2835,2367 Interestedinthisproductorhavequestions? ContactUs 2835,2367 BroadbandPlasmaPatternedWaferDefectInspectionSystems The2835and2367broadbandplasmadefectinspectionsystemsprovideindustryprovenperformanceforopticalpatterneddefectinspection,enablingdiscoveryandmonitoringofyield-criticaldefectson≥45nmlogic,memoryandspecialtydevices.Eachmodelisuniquelyequippedwithselectablewavelengthillumination,imagingpixels,opticmodesandadvancedalgorithmsfornoisesuppressionanddefectseparationtoprovidecost-effective,inlineinspectioncontrolforyourmostcriticallevels. ApplicationsInlinedefectdiscoveryandmonitoring,Hotspotdiscovery,Engineeringanalysis,Processwindowqual,Photocellmonitoring.RelatedProducts2835: PatternedwaferinspectionsystemwithbroadbandDUV-UV-Visiblespectrumtargetedfor≥45nmdesignnodes. Downloadbrochure. 2367: PatternedwaferinspectionsystemwithbroadbandUV-Visiblespectrumtargetedfor≥65nmdesignnodes. Downloadbrochure. Interestedinthisproductorhavequestions? ContactUs ShowDetails Puma™91xx Interestedinthisproductorhavequestions? ContactUs Puma™91xx LaserScanningPatternedWaferDefectInspectionSystems ThePuma™9130and9150laserimaginginspectorscombineUVilluminationopticswithmultiplehighspeedimagingsensorstoofferarangeofopticalmodesforcriticaldefectdetectioninlineonpatterned,productionwafers.The91xxdelivershighsamplingrates,highthroughputandhighsensitivityenablingmoreeffectivecaptureandcontrolofyield-impactingdefectsoncriticalFrontend-of-line(FEOL)andBack-end-of-line(BEOL)layers.The91xxcomplementstheKLA2367full-spectrumUV/visibleand2835DUV/UV/visiblebrightfieldinspectorsforacompletemixandmatchpatternedwaferinspectionstrategy. ApplicationsLinemonitor,Toolmonitor,Toolqualification,Filmdefectivity,Photocellmonitoring,ADI.RelatedProductsPuma9150: PatternedwaferinspectionwithUVilluminationlaser-basedimagingtechnology.The9150extendsthe9130withtheadditionofnormalillumination,enhanceddataratesandnewopticalmodesforimprovedcapability. Downloadbrochure. Puma9130: PatternedwaferinspectionwithUVilluminationlaser-basedimagingtechnology. Downloadbrochure. Interestedinthisproductorhavequestions? ContactUs ShowDetails eDR™-5210 Interestedinthisproductorhavequestions? ContactUs eDR™-5210 e-BeamWaferDefectReviewandClassificationSystem TheeDR™-5210electron-beam(e-beam)waferdefectreviewandwaferclassificationsystemcaptureshighresolutionimagesofdefects,producinganaccuraterepresentationofthedefectpopulationonawafer.TheeDRprovidesuniquelinkagetoKLAinspectorsforfasteryieldlearningduringICandwafermanufacturing. ApplicationsDefectimaging,Automaticinlinedefectclassificationandperformancemanagement,Barewaferoutgoingandincomingqualitycontrol,Waferdispositioning,Hotspotdiscovery,Defectdiscovery,Processwindowdiscovery,Processwindowqualification,Beveledgereview.eDR®isaregisteredtrademarkofKLACorporation. Interestedinthisproductorhavequestions? 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