A novel metamaterial-based antenna for on-chip ... - Nature

In this paper, we present a novel antenna design based on metamaterial properties that operates in the millimeter wave regime. This design ... Skiptomaincontent Thankyouforvisitingnature.com.YouareusingabrowserversionwithlimitedsupportforCSS.Toobtain thebestexperience,werecommendyouuseamoreuptodatebrowser(orturnoffcompatibilitymodein InternetExplorer).Inthemeantime,toensurecontinuedsupport,wearedisplayingthesitewithoutstyles andJavaScript. Advertisement nature scientificreports articles article Anovelmetamaterial-basedantennaforon-chipapplicationsforthe72.5–81 GHzfrequencyrange DownloadPDF DownloadPDF Subjects ElectricalandelectronicengineeringMaterialsfordevices AbstractInthispaperwepresentanovelmetamaterial-basedantennasimulatedusingHFSS.Theunitcellparameterswereextractedusingperiodicboundaryconditionsandwave-portexcitation.ThemetamaterialismagneticallycoupledtotheCPWline,theinducedcurrentinthehexagonalringgivesrisetoafieldperpendiculartotheincidentone.TheantennacanbemodeledbyanLCcircuit.Thisdesignachievesasignificantimpedancebandwidthof8.47 GHz(S11 = − 10 dBfrom72.56 GHzto81.03 GHz),andaminimumreturnlossof− 40.79 dBat76.89 GHz,whichclearlyindicatesgoodimpedancematchingto50Ω.Theproposedantennaoffersgainsfrom4.53to5.25dBi,withradiationefficienciesbetterthan74%.Compactness,simpledesignlayout,anoveldesign,andgoodradiationcharacteristicsforthisantennaarethemaincontributionsofthiswork.Theantennacanbebuiltontopofa300 µmthicksiliconwafer,forapplicationonHR-SOI-CMOStechnology.Whencomparedtootherantennadesignsforthesamefrequencyband,theproposedantennaachievesverygoodperformance.Thisdesignissuitableforthereceptionstageoflong-rangeautomobileradarsystems,duetoitswideHPBW,aswellasE-bandapplications,suchasbackhaulsystems. IntroductionTomeetthehugepublicdemandforcompact,wirelesssystems,antennas,besidetheothernecessaryelectroniccircuitry,mustbeintegratedonthesamesiliconchip,andthusresearchonon-chipantennas(AoC)hasbecomeaveryimportantfieldofendeavorinrecentyears1,2,3,4,5,6,7,8,justtomentionafew.On-chipantennasofferfullmonolithicintegrationofreceiversandtransmitters,withgreatrepeatability,sizereduction,lowpowerconsumption,andareductionofexternalinterconnections,suchasbondwiresorsolderballs9.Infact,AoChavebecomeaverydynamicfieldofendeavor,astheslewofrecentlypublishedreportsshows,spanningdifferenttechniquessuchascouplingandexcitationtechniques1,2,3,isolation4,circuitdesign5,andtheuseofmetamaterialandmetasurfaceproperties6,7,8.Ofthemanyapplicationsthathavebeenaddressedbydifferentresearchgroups,onethatfallsinthe76–81 GHzisvehicularradar10.Vehicularradarsystemsaredividedintotwomajorareas,thesignalprocessingandpowersupplyunit;andtheRFfront-end,whichcontainstheradartransceiverdeviceandoneormoreTXandRXantennas11.Infact,on-chipantennasaregoodcandidatesforthesesystems,mainlyduetotheircompactsize,lowpowerconsumptionandthepossibilitytofullyintegratetheRFfront-end.Itiswellknown,however,thatbulksiliconwithtypicalconductivitiesintherange1–10S/mforstandardCMOSprocessesleadstoverypoorantennaperformance,e.g.,typicalantennagainsof− 10dBi,duetosubstratelosses12.Overthepastfewyears,inordertoimprovethegain,directivity,andradiationefficiency,whileovercomingthelimitationsofsiliconsubstratesandmaintainingreducedsize,differenttypesofmetamaterialshavebeenproposed,suchasArtificialMagneticConductors,AMC;HighImpedanceSurfaces,HIS;ElectromagneticBand-Gapstructures,EBG;DoubleNegativeMaterials,DNG;ZerothOrderResonators,ZOR;andvarioustypesofmetasurfaces13,14,15,16,17,18,19,20.Inotherworks,externalresonators21,orlensesareused22,23,micromachiningisperformedaroundandbelowtheantenna24,thedopingprofilearoundtheantennaistailored12,itspositionisoptimized25,reflectorsareemployed26,andhighresistivity(HR)substratesareused27,28.Notwithstanding,themajorityofon-chipantennadevelopmentshavebeenmadeonSOI(Silicon-On-Insulator)substrateswithHRsilicon,butachievingantennagainsintherangeof− 3to3dBi.Suchlowgainvaluesareappropriateforshort-rangecommunications,uptoonemeter;typicalapplicationsarethehigh-dataratetransferandsynchronizationbetweensmartwirelessdevices(smart-phone,laptop,externalharddrives)usingawirelessUSB-likeconnection12.Inthispaper,wepresentanovelantennadesignbasedonmetamaterialpropertiesthatoperatesinthemillimeterwaveregime.Thisdesignresemblesthecenterofaflowerwithitspetals,andthuswerefertoitasa“FlowerMetamaterialAntenna”.Unlikeclassicandtraditionalantennas,thisoneisbasedonanewmetamaterialdesigntooperatefrom75to81 GHzonaHRsiliconwafer,anditisexcitedbyproximitywithacoplanarwaveguide(CPW),coveringthespectrumforlong-rangeautomotiveradars10,attaininghighergainstothoseobtainedwithSOItechnology,andachievinggoodradiationefficiency.Flower-metamaterialantennadesignThetopviewoftheproposedantennaisshowninFig. 1a,b.TheCPWlineusedtoexcitethemetamaterialisonahighermetallayeraboveathinlayerofsilicondioxide.Tomatchtheantenna’sinputimpedance,thewidthofthefeedline(Wt)iscalculatedat90 µm,andthegapbetweenthefeedandthegroundlineoneitherside(S)isfixedas45 µm.ThisCPWfeedishighlypreferredoveramicrostriplineinon-chipantennadesignsinceitexhibitslowerlosseswhentheselinesaredepositeddirectlyonhighresistivitysiliconsubstratesandarelesssensitivetobulkparametervariationssuchaschangesincarrierconcentration27.Figure1Topviewofproposedantenna(a)flower-metamaterialantennaandfeedline(CPW),(b)flower-metamaterialdesignand(c)cross-sectionalviewofproposedantenna.FullsizeimageThedesignparametersfortheproposedantennawereparametricallyoptimizedusingafull-wavesimulatortoobtainthedesiredresults,whicharelistedinTable1.Table1Designparameters.FullsizetableFigure 1cdepictsacrosssectionalviewoftheproposedstructure.A300 µmthickhighresistivitysiliconwafer(ρ ≥ 5kΩ cm,\(\tan\delta\)=0.05and\({\varepsilon}_{r}\)=11.8)wasusedasthesubstrate.Themetamaterialismadeofa2 µmthickcopper(Cu)layer.Inbetweenthesubstrateandtheradiatingstructure,thereisaninsulatinglayer,namelySiO2(\({\varepsilon}_{r}\)=3.9and\(\tan\delta\)=0.001)withathicknessof25 µm,andthefeedline(CPW)isplaced23 µmawayfromtheradiatingstructureinametallayerembeddedinaSiO2layer.Besides,a5 µmthickmetallayerisusedasareflectoronthebackside.TheFlower-Metamaterialstructurewaspreviouslydesignedwiththefull-wavesimulatorwithoutthefeedlinetoensureitbehavesasametamaterialstructure.Thedesignwasperformedfollowingthemethodologyproposedin29,andsomedetailsarepresentedin“Methods”section.Figure 2showstherealandimaginarypartsofthepermittivityandpermeabilityofthedesign,demonstratingitsmetamaterialbehavior(Left-Handedmaterial)inthefrequencybandofinterest,afteralengthysimulationprocess.Figure2Complexpermittivity(ε)andpermeability(μ)ofproposedflowergeometry.FullsizeimageMoreover,whentheunitcellissimulatedusingFloquetports,theflowermetamaterialpresentsaninterestingbehavior,whichisshowninFig. 3.From72to81 GHz,themodessupportedbytheflowerareTE00andTM00,andothermodes(m,n;differentfromzero)areattenuated(> 30 dB/mm).Theflowerunitcellchangesdepropagationdirection,curvesthedirectionofelectricandmagneticfields,andpartiallyeliminatesthemagneticfieldconcentrationonthesiliconwafer,confiningitmostlyonandabovetheflower.Figure3Electricalandmagneticfieldsfor(a)TE00mode,and(b)TM00mode.FullsizeimageTheoperationmechanismisasfollows:whentheCPWlineispositionedbelowthemetamaterialcell,themetamaterialcellismagneticallycoupledtotheCPWline.Themagneticfieldlines(oftheCPWline)thatpassthroughthehexagonalringinduceacurrentthatgivesrisetoanelectricfieldinadirectionperpendiculartotheincidentwave.Thismagneticcoupling,theinducedcurrent,andtheelectricandmagneticfieldsareshowninFig. 4.Figure4Operationmechanism:(a)magneticcoupling,(b)inducedcurrent,and(c)fieldsthroughoutthestructure.FullsizeimageThedesignoftheproposedunitcellisalengthyprocessandmanyvariablesplayanimportantrole.However,abriefdesignevolutionispresentedbelowwithonly5steps,comparingthreeimportantfiguresofmeritconsideredduringthedesignprocess.ResultsThissectiondemonstratesthattheproposeddesignhassignificantpotentialforon-chipradarsystems,especiallyforthereceptionstage,duetoitswideHPBW,highgain,smallsizeandeaseoffabrication.Inthecaseofthetransmitterstage,amoderatetohighgain(betterthan3dBi)andanarrowbeamarerequired,andsomeimprovementstothedesignwouldbenecessarytosatisfythem.Figure 5showsthesimulatedreturnlossoftheproposednovelflowermetamaterial-basedantennaandimpedancebandwidth(|S11|≤ − 10 dB)of8.47 GHz,from72.56 GHzto81.03 GHz,consideringareferenceimpedanceof50Ω.Theelectricalandmagneticplanes(H-planeφ = 0°andE-planeφ = 90°)radiationparameters(inmagnitude)arepresentedinFig. 6,whichprovethatthedesigncoverstheentirefrequencybanddestinedforlong-rangeradars(76–81 GHz)andpartiallytheE-band(71–86 GHz).Figure5Briefdesignevolutionoftheproposedflowermetamaterial-basedantenna,andcomparisonofthreeofthefiguresofmeritversusfrequency.FullsizeimageFigure6Electric(leftside)andmagnetic(rightside)fieldmagnitudeatthreefrequencypoints:72.5 GHz(lower),77 GHz(central),and81 GHz(higher).FullsizeimageThe2DradiationpatternsareshowninFig. 7forthreefrequencypoints(lower,central,andhigher),remainingalmostunchangedthroughoutthefrequencyrangefrom72.5to81 GHz,withonlyonebeamandmaintainingsymmetryacrossthebandwidth.Thefront-backratioiscloseto19 dB,butahigherF/Bratiocanbeobtainedbyincreasingthereflectorplanesize.Figure7Normalizedradiationpatternsatthreefrequencypoints:72.5 GHz(lower),77 GHz(central),and81 GHz(higher).FullsizeimageThecomparisonofco-polarizationandcross-polarization,withandwithoutflowermetamaterial,isshowninFig. 8.Thisdesignhascross-polarizationvalueslowerthan−30 dB,andco-polarizationgreaterthan4.5 dB,whichguaranteesthatthewavesarealmostpurelylinearlypolarizedtotheright,consideringthevaluesofaxialratio(AR → ∞)andRHCP-LHCPgains,obtainedfromthefullwavesimulator.Figure8Comparisonofcross-polarizationandco-polarizationversusfrequencyofthedesignwithandwithoutproposedflowermetamaterial.FullsizeimageFurthermore,thepeakgainsshowninFig. 5showthattheproposeddesignimprovesgainby32%at72.5 GHz,31.16%at73 GHz,27.94%at74 GHz,29%at75 GHz,23.51%at76 GHz,18.79%at77 GHz,14.61%at78 GHz,10.63%at79 GHz,6.8%at80 GHzand3.6%at81 GHz.Likewise,theradiationefficiencyisimprovedfrom72.5 GHzto78 GHz,andfrom79to81 GHzitdecreasesslightly,butremainsabove74%.Furthermore,thesecurvesshowthattheflowermaterialactsasanLCcircuit,duetotheconcentrationsofelectricandmagneticfieldsinthedesign.Anequivalentcircuitforthemetamaterial-basedantennawasderived,anditisshowninFig. 9a.Thelumpedelementsvaluesofthemodelare:\({L}_{L}=1.56pH,\;{C}_{L}=2.53pF,\;{L}_{1}={L}_{2}=10.1fF,\;{C}_{1}=20fF,\;{C}_{2}={C}_{3}=66pF,\;{C}_{4}=0.1fF,\;{C}_{cpw}=24.8fF,\;{L}_{cpw}/4=44.45pH\).Thecomparisonbetweenmodelandfull-wavesimulationsisshowninFig. 9b.Figure9(a)Proposedequivalentcircuit,and(b)comparisonofequivalentcircuitwithfull-wavesimulationresults.FullsizeimageItisnoteworthythatthisisanoriginaldesign,whichhasmanyadvantagesoverotherreportedantennasforthesamefrequencyrange13,14,21,22,30,31,whosecharacteristicsarelistedinTable2.Table2Comparisonwithrelatedworks.FullsizetableItisimportanttoconsiderthatthedesignsonceramicsubstratesattainahighergain,sincethesematerialshavelowerlossesthanasemiconductorsubstrate.Thesedesigns,however,occupyaverylargeareaandhaveanarrowerbandwidththanourdesign.Ontheotherhand21,haslowerefficiency,occupiesalargerareaandvolume,andisbasedonaquartzcrystal.Thedesignin13hasahigherbandwidthanddoesnotoccupyalargearea,butthegainandcouplingattheinputarelow.Theantennareportedby14isapproximately13timeslargerthantheonepresentedhere,andachievesagainofjust1.46timesthatoftheoneobtainedwiththeproposeddesign,inadditiontopresentinga1 GHzbandwidth.Finally,thehalfpowerbeamwidthinallthecasesislowerthantheoneobtainedinourdesign,whichmeansthatthosedesignshaveveryfinebeams,whichareappropriateforthetransmissionstage,butnotforRxantennas,whichrequirealargefieldofview32.Additionally,whentheproposeddesigniscomparedwithdesignsworkingatTHzrange4,8,thisdesignhaslowergain,sincebothdesigns4,8usepolyimideassubstrate;thereforeitistobeexpectedthatthegainswillbehigher,becausethesubstratehasalowerlosscoefficient.Comparedwith8theproposednoveldesignhashigherefficiency,andis36timessmaller,andcomparedwith4,ourdesignis270timessmaller,evenwhentheoperatingfrequencyofourdesignislower.DiscussionHereinwehavepresentedanovelflower-metamaterialantennadesignedtoworkfrom72.5to81 GHz.Thisantennadesign,onaHR-Siliconwafer,hasmediumtohighgain,acceptabledirectivity,goodradiationefficiency,widebandwidth,andcompactsize,whichisidealforon-chipautomobileradarapplications,particularlyforthereceptionstage,consideringitswideHPBW.Theradiationpatternshowsonlyonebeamfrom72.5to81 GHz.AhigherF/Bratiocanbeobtainedbyincreasingthereflectorplanesize,andthepolarizationisalmostpurelylinear,duetogoodvaluesofcross-polarizationandco-polarizationinalltherange.Thesuggestedfabricationprocessforprototypingoftheproposeddesignisasfollows:thegroundplane,flowermetamaterial,andfeedlinecanbeof1–2 μmofcopperoraluminum.Thethicklayerofsilicondioxidecanbeobtainedfromwetthermaloxidationprocess,butalsocanbereplacedwithothermaterial,suchaspolyamideorpolyimide,andsomedimensionsshouldbeadjustedtoensuretheimpedancebandwidthfrom72.5to81 GHz.Thenewproposedantennabasedontheso-called“flowermetamaterials”canbeintegratedintoaHR-SOI-CMOSprocess,inthelastlayeroftheBEOL,thatis,becauseaseparationbetweentheexcitationlineandmetamaterialof23μmisrequired,whenSiO2isusedbetweenbothmetallayers.MethodsAllthefull-wavesimulationswereperformedusingAnsyselectromagneticssuite2021/R1(HighFrequencyStructureSimulator,HFSS)(https://www.ansys.com/products/electronics/ansys-hfss).Forthedesignandextractionoftheparametersofthemetamaterialunitcell,theprocesspresentedinFig. 10wasfollowed.Isaniterativeprocess.AdditionalsimulationswereperformedwithFloquetportsandmaster–slaveconditionstocalculatethemodesthattheflowermetamaterialsupports,aswellasthefields,whicharepresentedinFig. 3.Figure10Methodologyfordesignandextractionofparametersofunitcellmetamaterial.FullsizeimageFortheradiationparametersAnsysisalsoused,withalumpedportfortheexcitationwithinputimpedanceof50Ωandradiationboxwithdimensionsbetterthan\({{\varvec{\lambda}}}_{0}\;(\text{at}\;80\;\text{GHz})\).Multiplesolutionfrequenciesareusedinthesimulationtoguaranteeaccuracyacrossthefrequencysweep.TheequivalentcircuitwasmodeledwithAdvancedDesignSystem(ADS).Theproposedequivalentcircuitisbasedontransmissionlinetheory.ThethreestageshowninFig. 9a(inblueboxes)representtheflowerdividedinthreeparts;\({{\varvec{C}}}_{4}\)representsthecapacitancebetweenthepetalsoftheflowershape;\({{\varvec{L}}}_{{\varvec{L}}}\)and\({{\varvec{C}}}_{{\varvec{L}}}\)aretheprincipalelementsofthisequivalentcircuit,bothrepresentstheelectromagneticfieldsatresonantfrequency;and\({{\varvec{L}}}_{{\varvec{c}}{\varvec{p}}{\varvec{w}}}/4\)and\({{\varvec{C}}}_{{\varvec{c}}{\varvec{p}}{\varvec{w}}}\)arethelumpedelementsoftheCPWline.Theterm\({{\varvec{L}}}_{{\varvec{c}}{\varvec{p}}{\varvec{w}}}/4\)representstheinductancewhentheflowerismagneticallycoupledtothetransmissionline.ConclusionsHereinwehavepresentedanovelflower-metamaterialantennaworkingfrom72.5to81 GHz.ThisantennadesignoverHR-Siliconwaferhasmedium–highgain(betterthan4.5dBi),goodradiationefficiency(higherthan74%),wideimpedancebandwidth(8.47 GHz),andcompactsize(1mm2).Moreover,herewepresentanequivalentcircuitofthenovelflowermetamaterial-basedantenna.TheproposeddesignissuitableforapplicationsofE-band,suchasbackhaulsystems,andautomobileradarsystems. 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DownloadreferencesAcknowledgementsTheauthorswouldliketoexpresstheirgratitudetowardsMexicanNationalCouncilforScienceandTechnology(CONACyT)bythefinancialsupportunderGrant852217andGrant285199.FundingThisworkwassupportedinpartbytheMexicanNationalCouncilforScienceandTechnology(CONACyT)underGrant285199andGrant852217.AuthorinformationAuthorsandAffiliationsElectronicsDepartment,InstitutoNacionaldeAstrofísica,ÓpticayElectrónica(INAOE),72840,Puebla,MexicoKarenN.Olan-Nuñez & RobertoS.Murphy-ArteagaAuthorsKarenN.Olan-NuñezViewauthorpublicationsYoucanalsosearchforthisauthorin PubMed GoogleScholarRobertoS.Murphy-ArteagaViewauthorpublicationsYoucanalsosearchforthisauthorin PubMed GoogleScholarContributionsK.N.conceivedtheidea,designedthestructure,andwrotetheprincipalideas.R.Mrevisedthemanuscript,contributedsomeideas,andsupervisedthework.CorrespondingauthorCorrespondenceto RobertoS.Murphy-Arteaga.Ethicsdeclarations Competinginterests Theauthorsdeclarenocompetinginterests. 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ReprintsandPermissionsAboutthisarticleCitethisarticleOlan-Nuñez,K.N.,Murphy-Arteaga,R.S.Anovelmetamaterial-basedantennaforon-chipapplicationsforthe72.5–81 GHzfrequencyrange. SciRep12,1699(2022).https://doi.org/10.1038/s41598-022-05829-0DownloadcitationReceived:08September2021Accepted:12January2022Published:01February2022DOI:https://doi.org/10.1038/s41598-022-05829-0SharethisarticleAnyoneyousharethefollowinglinkwithwillbeabletoreadthiscontent:GetshareablelinkSorry,ashareablelinkisnotcurrentlyavailableforthisarticle.Copytoclipboard ProvidedbytheSpringerNatureSharedItcontent-sharinginitiative CommentsBysubmittingacommentyouagreetoabidebyourTermsandCommunityGuidelines.Ifyoufindsomethingabusiveorthatdoesnotcomplywithourtermsorguidelinespleaseflagitasinappropriate. 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