KLA ICOS

Laser inspection system - scanning / for wafers / surface defect

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Find out all of the information about the KLA - TENCOR product: laser inspection system Voyager™. Contact a supplier or the parent company directly to get a ... SELLYOURPRODUCTS*mydirectindustry EnglishProductsCatalogsProjectsNews&TrendsE-MAGAZINEMetrology-LaboratoryInspectionandMonitoringLaserinspectionsystemKLA-TENCORProductsProductsCatalogsNews&TrendsExhibitionsLaserinspectionsystemVoyager™scanningforwaferssurfacedefectAddtofavoritesComparethisproduct GototheKLA-TENCORwebsiteformoreinformationCharacteristicsTechnologylaser,scanningApplicationsforwafersTypesurfacedefectDescriptionVoyager™ LaserScanningPatternedWaferDefectInspectionSystems TheVoyager™1015laserscanninginspectionsystemsupportsproductionrampdefectmonitoring,specializinginafter-developinspection(ADI)forbothimmersion(193i)andEUVlithography,whenthewafercanstillbereworked.ADUVlaser,newopticsdesignandlargestcollectionsolidangleproducethedefectsensitivityrequiredforthetightpitchesfoundinADIatadvanceddesignnodes.Customsensorsandaswitchablelaserenableinspectionofdelicatephotoresistmaterials,whileobliqueilluminationandadvancedalgorithmssuppressnoisesourcesinherenttoADIinspectionsformorerelevantresults.TheVoyager1015delivershighthroughputcaptureofcriticaldefectsinthelithocellandothermodulesofthefaballowingprocessissuestobeidentifiedandrectifiedrapidly. Applications Linemonitor,Toolmonitor,Toolqualification,193iandEUVresistqualificationCatalogsNocatalogsareavailableforthisproduct.SeeallofKLA-TENCOR‘scatalogsGototheKLA-TENCORwebsiteformoreinformationOtherKLA-TENCORproductsDefectInspectionandReviewwaferinspectionsystem390xxseriessurfacedefectopticalinspectionmachine29xxseriesforpatternedwafershigh-resolutiondefectopticalinspectionmachinePuma™9980forpatternedwafersdefectopticalinspectionsystem8seriesscanningforwafersLEDopticalinspectionmachineCIRCL™forwafersmacrodefectopticalinspectionmachineSurfscanseriessurfaceforunpatternedwafershigh-resolutionautomatedinspectionmachineeDR7xxx™seriesopticalforwafersdefectSeeallKLA-TENCORproductsRelatedSearchesInspectionsystemInspectionmachineMeasurementmonitoringdeviceReal-timemonitoringdeviceTemperaturemonitoringdeviceAutomatedinspectionsystemProcessmonitoringdeviceSurfaceinspectionsystemDefectinspectionmachineMeasurementinspectionmachineOpticalinspectionsystemSurfaceinspectionmachineAutomatedinspectionmachineInspectionsystemforthepackagingindustryOpticalinspectionmachineHigh-resolutioninspectionmachineSurfacedefectinspectionsystemProductioninspectionsystem3DinspectionsystemFastinspectionsystem*Pricesarepre-tax.Theyexcludedeliverychargesandcustomsdutiesanddonotincludeadditionalchargesforinstallationoractivationoptions.Pricesareindicativeonlyandmayvarybycountry,withchangestothecostofrawmaterialsandexchangerates.Brandlist Distributorlist-

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