KLA Tencor - Semiconductor Technology

Patterned and unpatterned wafer defect inspection tools find particles, pattern defects and electrical issues on the front surface, back surface and edge of the ... SemiconductorTechnologyisusingcookies Weusethemtogiveyouthebestexperience.Ifyoucontinueusingourwebsite,we'llassumethatyouarehappytoreceiveallcookiesonthiswebsite. ContinueLearnMore X Advertisewithus Trending: KLATencorProcessControlandYieldManagementforInspectionandMetrologyTechnologies CompanyDetails Products&Services Videos WhitePapers Projects PressReleases RegionalOffices FollowCompany KLA-Tencor,aleadingproviderofprocesscontrolandyieldmanagementsolutions,partnerswithcustomersaroundtheworldtodevelopstate-of-the-artinspectionandmetrologytechnologies.Thesetechnologiesservethesemiconductor,datastorage,LED,photovoltaicandotherrelatednanoelectronicsindustries.Withaportfolioofindustry-standardproductsandateamofworld-classengineersandscientists,thecompanyhascreatedsuperiorsolutionsforitscustomersforover30years.HeadquarteredinMilpitas,California,KLA-Tencorhasdedicatedcustomeroperationsandservicecentersaroundtheworld. Front-enddefectinspection,reviewandanalysis KLA-Tencorfront-enddefectinspectiontoolscoverthefullrangeofyieldapplicationswithintheICmanufacturingenvironment.Thisincludesincomingwaferqualification,researchanddevelopment,andtool,processandlinemonitoring.Patternedandunpatternedwaferdefectinspectiontoolsfindparticles,patterndefectsandelectricalissuesonthefrontsurface,backsurfaceandedgeofthewafer.Defectreviewsystemscapturehigh-resolutionimagesofthedefectsdetectedbyinspectors,enablingdefectclassification.Thedefectdatageneratedbyinspectionandreviewtoolsarecompiledandreducedtorelevantroot-causeandyield-analysisinformationwithoursuiteofdatamanagementtools. Byimplementingourportfolioofdefectinspectors,defectreviewandclassificationtoolsanddatamanagementsystems,chipmakersareabletoquicklyidentify,monitorandresolveprocessissues,resultinginhigheryieldandfastertimetomarket. Metrology,analysisandprocesswindowoptimization KLA-TencoroffersabroadportfolioofmetrologysolutionsthataddressICmanufacturers’complexprocesscontrolmeasurementchallenges.Precisemetrologyandcontrolofpatterndimensions,filmthicknesses,layer-to-layeralignment,patternplacement,surfacetopographyandelectro-opticalpropertiesaregrowinginimportanceascriticaldimensionsnarrow,filmthicknessesshrinktocountablenumbersofatomiclayersanddevicesbecomemorecomplex. Whetherverifyingthatadesignwillbemanufacturable,characterizinganewprocess,ormonitoringhigh-volumemanufacturingprocesses,itscomprehensivesetofmetrology,analysisandprocesswindowoptimizationproductsgivesICmanufacturerstheabilitytoproducehigh-performance,reliabledevices. Reticlemanufacturingandrequalification Error-freereticles,ormasks,arethefirststepinachievinghighsemiconductordeviceyields,sincereticledefectscanbereplicatedonproductionwafers.KLA-Tencoroffershighsensitivityreticleinspectionandmetrologysystemsformaskshops,helpingensurethatreticlesaredefect-freeandmeetmaskmetrologyrequirements.Thereticleinspectionsystemsuseopticalimagingandmultipleinspectionmodestofindalltypesofreticledefectspriortoprintingonthewafer. Themetrologysystemsensurequalityreticlemanufacturingbyprovidingthebestprecisionforreticlepatternplacementandaccuratemeasurementofreticles’criticaldimensions.WithintheICmanufacturingenvironment,chipmakersrelyonitshigh-sensitivityreticledefectinspectiontoolstoensurethatreticlesaredefect-freetherebypreventingreticledefectsfromprintingonproductionwafers. Makeanenquiry Address KLATencor OneTechnologyDrive Milpitas 95035 California Other UnitedStatesofAmerica +14084344200 +14088753000 +14088754266 [email protected] www.kla-tencor.com KLATencorImages MessageCompany Makeanenquiry Followthiscompany Followthecompanytobealwaysuptodatewiththiscompany ProductsandServices Video WhitePapers RelatedProjects PressRelease RegionalOffices KLATencor OneTechnologyDrive Milpitas 95035 California Other UnitedStatesofAmerica +14084344200 +14088753000 +14088754266 [email protected] www.kla-tencor.com Recommendedarticle Whywebelieveworkplacehealthandwellnessisimportant Read Close Downloadafree10pagepreviewofourMergers&AcquisitionsinTMT–ThematicResearch2019Report Getyourfreedownload Recommendedarticle ClinicalTrialContinuityinAsia-PacificduringtheCOVID-19pandemic Read Close Recommendedarticle AsneakpeekintoCanada’slargesttransitexpansion Read Close Recommendedarticle Precisionwireforvasculartherapy:HowEXERA®risestothechallenge Read Close Close Close Close Weusecookiestoensurethatwegiveyouthebestexperienceonourwebsite.Ifyoucontinuetousethissitewewillassumethatyouarehappywithit.Ok