Wafer Inspection - Semiconductor Engineering

The idea is to find a defect of interest on a wafer. In the inspection process, a wafer inspection tool takes a photo of a die. Then, the tool takes a photo of ... 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Description Waferinspection,thescienceoffindingdefectsonawafer,isbecomingmorechallengingandcostlyateachnode.Thisisduetoprocessshrinks,designcomplexitiesandnewmaterials.Inaddition,theabilitytodetectsub-30nmdefectsischallengingwithtoday’sopticalinspectiontools. Theideaistofindadefectofinterestonawafer.Intheinspectionprocess,awaferinspectiontooltakesaphotoofadie.Then,thetooltakesaphotoofanotherdieandcomparesthem.Ifthere’sachange,that’sgenerallyadefect. Fromthere,thecomplexitiesmount.Inoneexampleofthechallenges,theinspectiontoolmayfinddefectsonawafer.Thesystemmayalsodetectwhatiscommonlycalledanuisance.Insimpleterms,anuisanceisanirregularityorfalsedefectonthewafer,butisnotadefectofinterest. Inthepast,atoolcouldprocesstheinformationanddelineatethedifferencebetweenthedefectsandnuisancesonamap.Butinmoreadvancednodes,thenuisancesanddefectsappeartobebunchedtogetheronthemap.Andit’sbecomingmoredifficulttodistinguishthedifferencesbetweenthetwo. Inafab,chipmakersgenerallymakeuseofseveraldifferenttypesofwaferinspectiontooltechnologies: 1.Brightfieldinspection.Using193nmlightsources,brightfieldinspectionistheworkhorsetechnologyinthefab.Usedtofinddefectsduringthetransistorfabricationprocess,brightfieldcollectslightreflectedfromadefect.Inturn,thedefectappearsdarkagainstawhitebackground. Ingeneral,optical-basedinspectioncaneasilyfinddefectsdownto30nm.Thegreyareaforopticalissomewherebetween20nmto10nm,butthetechnologyisbeingstretchedtothelimitbelow10nm,accordingtoexperts. 2.Darkfieldinspection.Usedintheproductionflow,darkfieldisthemeasurementoflightreflectedatalowerangle.Darkfieldisbasedonopticaltechnology. 3.Electron-beaminspection.Intheflow,chipmakersfirstusee-beaminspection,mainlyforengineeringanalysis.E-beamisabletofindthesmallestdefectsinchips.Theresolutionsaredownto3nm.Butthethroughputsaretooslowtoputthesetoolsintotheproductionflow. 4.Multi-beame-beaminspection.Toboostthethroughputsine-beaminspection,theindustryisworkingonatechnologythatmakesuseofmultiplebeams.StillinR&D,thefirsttoolscouldappearinlate2015orearly2016.Eventhen,multi-beaminspectionwon’treplacetraditionalopticalande-beamtools. Therearesimilaritiesanddifferencesbetweenmulti-beaminspectionandmulti-beamfordirect-writelithographyapplications.Inbothcases,multi-beamtechnologyischallenging.Theelectronsinthecolumnstendtodisturbeachother,whichimpacttheperformanceofasystem. Inmulti-beaminspection,thereareseveraltypesofapproaches-multiplebeams;multiplecolumnsandmultiple-objectivelens;multiplecolumnsandsingle-objectivelens;andminiaturecolumns.Ontopofthat,agiventoolcouldhavearangeofbeamcounts. RelatedStories StrategiesForFasterYieldRampsOn5nmChips PublishedonApril12,2022 FundamentalShiftsInICManufacturingProcesses PublishedonMarch14,2022 HBM,NanosheetFETsDriveX-rayFabUse PublishedonMarch8,2022 PCBAndICTechnologiesMeetInTheMiddle PublishedonOctober12,2021 FabsDriveDeeperIntoMachineLearning PublishedonSeptember7,2021 DesigningChipsForTestData PublishedonAugust10,2021 WhyWaferBumpsAreSuddenlySoImportant Publishedon ICDataHotPotato:WhoOwnsAndManagesIt? 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Abriefhistoryofdesign WestartwithschematicsandendwithESL Abriefhistoryoflogicsimulation Importanteventsinthehistoryoflogicsimulation Abriefhistoryoflogicsynthesis Earlydevelopmentassociatedwithlogicsynthesis Acronyms Commonlyandnot-so-commonlyusedacronyms. ADAS:AdvancedDriverAssistanceSystems Sensingandprocessingtomakedrivingsafer. Advanced(Smart)Fill Atnewernodes,moreintelligenceisrequiredinfillbecauseitcanaffecttiming,signalintegrityandrequirefillforalllayers. AdvancedPackaging Acollectionofapproachesforcombiningchipsintopackages,resultinginlowerpowerandlowercost. Agile Anapproachtosoftwaredevelopmentfocusingoncontinualdeliveryandflexibilitytochangingrequirements AgileHardwareDevelopment HowAgileappliestothedevelopmentofhardwaresystems AirGap Awayofimprovingtheinsulationbetweenvariouscomponentsinasemiconductorbycreatingemptyspace. AmbientIntelligence Acollectionofintelligentelectronicenvironments. Analog Semiconductorsthatmeasurereal-worldconditions Analogcircuits Analogintegratedcircuitsareintegratedcircuitsthatmakearepresentationofcontinuoussignalsinelectricalform. AnalogDesignandVerification Thedesignandverificationofanalogcomponents. ApplicationProgrammingInterface(API) Asoftwaretoolusedinsoftwareprogrammingthatabstractsalltheprogrammingstepsintoauserinterfaceforthedeveloper. Applicationspecificintegratedcircuit(ASIC) Acustom,purpose-builtintegratedcircuitmadeforaspecifictaskorproduct. Application-SpecificStandardProduct(ASSP) AnICcreatedandoptimizedforamarketandsoldtomultiplecompanies. Architectures ArtificialIntelligence(AI) Usingmachinestomakedecisionsbaseduponstoredknowledgeandsensoryinput. Assertion Codethatlooksforviolationsofaproperty AtomicForceMicroscopy(AFM),AtomicForceMicroscope(AFM) Amethodofmeasuringthesurfacestructuresdowntotheangstromlevel. AtomicLayerDeposition(ALD) Amethodofdepositingmaterialsandfilmsinexactplacesonasurface. AtomicLayerEtch(ALE) ALEisanext-generationetchtechnologytoselectivelyandpreciselyremovetargetedmaterialsattheatomicscale. AutomaticTestEquipment(ATE) AutomaticTestPatternGeneration(ATPG) Thegenerationofteststhatcanbeusedforfunctionalormanufacturingverification Automotive Issuesdealingwiththedevelopmentofautomotiveelectronics. AutomotiveEthernet,TimeSensitiveNetworking(TSN) TimesensitivenetworkingputsrealtimeintoautomotiveEthernet. AvalancheNoise Noiseinreversebiasedjunctions AVM VerificationmethodologycreatedbyMentor Backend-of-the-line(BEOL) ICmanufacturingprocesseswhereinterconnectsaremade. Bandgap Batteries Devicesthatchemicallystoreenergy. BehavioralSynthesis Transformationofadesigndescribedinahigh-levelofabstractiontoRTL Biometrics Securitybasedonscansoffingerprints,palms,faces,eyes,DNAormovement. BlechEffect Areverseforcetoelectromigration. BluetoothLowEnergy AlsoknownasBluetooth4.0,anextensionoftheshort-rangewirelessprotocolforlowenergyapplications. Brazil BSIM Transistormodel Built-inself-test(BiST) On-chiplogictotestadesign. BusFunctionalModel Interfacemodelbetweentestbenchanddeviceundertest C,C++ C,C++aresometimesusedindesignofintegratedcircuitsbecausetheyofferhigherabstraction. CacheCoherentInterconnectforAccelerators(CCIX) Interconnectstandardwhichprovidescachecoherencyforacceleratorsandmemoryexpansionperipheraldevicesconnectingtoprocessors. CANbus AutomotivebusdevelopedbyBosch CD-SEM:Critical-DimensionScanningElectronMicroscope CD-SEM,orcritical-dimensionscanningelectronmicroscope,isatoolformeasuringfeaturedimensionsonaphotomask. CDCdesignprinciples MakingCDCinterfacespredictable Cell-AwareTest Faultmodelforfaultswithincells Cell-AwareTestforFinFET Cell-awaretestmethodologyforaddressingdefectmechanismsspecifictoFinFETs. CentralProcessingUnit(CPU) TheCPUisandedicatedintegratedcircuitorIPcorethatprocesseslogicandmath. Characterization/MetrologyLab AlabthatwrkswithR&Dorganizationsandfabsinvolvedintheearlyanalyticalworkfornext-generationdevices,packagesandmaterials. Checker Testbenchcomponentthatverifiesresults ChemicalVaporDeposition(CVD) Aprocessusedtodevelopthinfilmsandpolymercoatings. China ChipDesign Designistheprocessofproducinganimplementationfromaconceptualform ChipDesignandVerification Thedesign,verification,implementationandtestofelectronicssystemsintointegratedcircuits. ChipThermalInterfaceProtocol Exchangeofthermaldesigninformationfor3DICs Chiplets ClockDomainCrossing(CDC) Asynchronouscommunicationsacrossboundaries ClockGating Dynamicpowerreductionbygatingtheclock ClockTreeOptimization Designofclocktreesforpowerreduction Cloud ThecloudisacollectionofserversthatrunInternetsoftwareyoucanuseonyourdeviceorcomputer. CMOS Fabricationtechnology Cobalt Cobaltisaferromagneticmetalkeytolithium-ionbatteries. CodeCoverage Metricsrelatedtoaboutofcodeexecutedinfunctionalverification CombinatorialEquivalenceChecking Verifyfunctionalitybetweenregistersremainsunchangedafteratransformation Communications Theplumbingonchip,amongchipsandbetweendevices,thatsendsbitsofdataandmanagesthatdata. Communicationssystems Companies&Organizations Compiled-codeSimulation Fasterformforlogicsimulation ComplementaryFET(CFET) ComplementaryFET,anewtypeofverticaltransistor. ComputeExpressLink(CXL) InterconnectbetweenCPUandaccelerators. Contact Thestructurethatconnectsatransistorwiththefirstlayerofcopperinterconnects. ConvolutionalNeuralNetwork(CNN) Atechniqueforcomputervisionbasedonmachinelearning. Coverage Completionmetricsforfunctionalverification Crosstalk Interferencebetweensignals Cryptoprocessors Cryptoprocessorsarespecializedprocessorsthatexecutecryptographicalgorithmswithinhardware. CurrentIntellectualPropertyCompanies CompaniessupplyingIPorIPservices DarkSilicon AmethodofconservingpowerinICsbypoweringdownsegmentsofachipwhentheyarenotinuse. DataAnalytics DataanalyticsusesAIandMLtofindpatternsindatatoimproveprocessesinEDAandsemimanufacturing. DataAnalytics&Test Howsemiconductorsaresortedandtestedbeforeandafterimplementationofthechipinasystem. DataCenters AdatacenterisaphysicalbuildingorroomthathousesmultipleserverswithCPUsforremotedatastorageandprocessing. Dataprocessing Dataprocessingiswhenrawdatahasoperandsappliedtoitviaacomputerorservertoprocessdataintoanotheruseableform.Thisdefinitioncategoryincludeshowandwherethedataisprocessed. DeFactoStandards Astandardthatcomesaboutbecauseofwidespreadacceptanceoradoption. Debug Theremovalofbugsfromadesign DeepLearning(DL) Deeplearningisasubsetofartificialintelligencewheredatarepresentationisbasedonmultiplelayersofamatrix. Definitions Dennard’sLaw Anobservationthatasfeaturesshrink,sodoespowerconsumption. Deposition DesignforManufacturing(DFM) ActionstakenduringthephysicaldesignstageofICdevelopmenttoensurethatthedesigncanbeaccuratelymanufactured. DesignforTest(DFT) Techniquesthatreducethedifficultyandcostassociatedwithtestinganintegratedcircuit. DesignPatent Protectionfortheornamentaldesignofanitem DesignRuleChecking(DRC) Aphysicaldesignprocesstodetermineifchipsatisfiesrulesdefinedbythesemiconductormanufacturer DesignRulePatternMatching Locatingdesignrulesusingpatternmatchingtechniques. DeviceNoise Sourcesofnoiseindevices DFTandClockGating Insertionoftestlogicforclock-gating DiamondSemiconductors Awide-bandgapsyntheticmaterial. DigitalIP CategorizationofdigitalIP DigitalOscilloscope Allowedanimagetobesaveddigitally DigitalSignalProcessor(DSP) Adigitalsignalprocessorisaprocessoroptimizedtoprocesssignals. DigitalTwins Adigitalrepresentationofaproductorsystem. DirectedSelf-Assembly(DSA) Acomplementarylithographytechnology. DNAbiometrics DNAanalysisisbaseduponuniqueDNAsequencing. DNAChips Usingdeoxyribonucleicacidtomakechipshacker-proof. DoublePatterning Apatterningtechniqueusingmultiplepassesofalaser. DoublePatterningMethodologies Coloredandcolorlessflowsfordoublepatterning DRAM:DynamicRandomAccessMemory Singletransistormemorythatrequiresrefresh DynamicVoltageandFrequencyScaling(DVFS) Dynamicallyadjustingvoltageandfrequencyforpowerreduction e HardwareVerificationLanguage E-beamInspection Aslowermethodforfindingsmallerdefects. E-BeamLithography Lithographyusingasinglebeame-beamtool EDA&Design EdgeComputing EdgePlacementError(EPE) ThedifferencebetweentheintendedandtheprintedfeaturesofanIClayout. Electromigration Electromigration(EM)duetopowerdensities ElectronicDesignAutomation(EDA) ElectronicDesignAutomation(EDA)istheindustrythatcommercializesthetools,methodologiesandflowsassociatedwiththefabricationofelectronicsystems. ElectronicSystemLevel(ESL) LevelsofabstractionhigherthanRTLusedfordesignandverification ElectrostaticDischarge(ESD) Transferofelectrostaticcharge. EmbeddedFPGA(eFPGA) AneFPGAisanIPcoreintegratedintoanASICorSoCthatofferstheflexibilityofprogrammablelogicwithoutthecostofFPGAs. Emulation Specialpurposehardwareusedforlogicverification EnergyHarvesting Capturingenergyfromtheenvironment Engineers:Jobs&Education EnvironmentalNoise Noisecausedbytheenvironment Epitaxy Amethodforgrowingordepositingmonocrystallinefilmsonasubstrate. ErasableProgrammableReadOnlyMemory(EPROM) ProgrammableReadOnlyMemorythatwasbulkerasable. eRM Reusemethodologybasedontheelanguage ErrorCorrectionCode(ECC) Methodsfordetectingandcorrectingerrors. Ethernet Ethernetisareliable,openstandardforconnectingdevicesbywire. EUV:ExtremeUltravioletLithography EUVlithographyisasoftX-raytechnology. FablessSemiconductorCompanies FailureAnalysis Findingoutwhatwentwronginsemiconductordesignandmanufacturing. Fan-Outs Awayofincludingmorefeaturesthatnormallywouldbeonaprintedcircuitboardinsideapackage. FaultSimulation Evaluationofadesignunderthepresenceofmanufacturingdefects Femtocells Thelowestpowerformofsmallcells,usedforhomeWiFinetworks. FerroelectricFETs(FeFET) FerroelectricFETisanewtypeofmemory. FieldProgrammableGateArray(FPGA) Reprogrammablelogicdevice Fill Theuseofmetalfilltoimproveplanarityandtomanageelectrochemicaldeposition(ECD),etch,lithography,stresseffects,andrapidthermalannealing. FinFET Athree-dimensionaltransistor. FlashMemory non-volatile,erasablememory FlexibleHybridElectronics(FHE) Integratedcircuitsonaflexiblesubstrate FlexRayISO17458 Anautomotivecommunicationsprotocol FlickerNoise Noiserelatedtoresistancefluctuation Flip-Chip Atypeofinterconnectusingsolderballsormicrobumps. ForksheetFET AtransistortypewithintegratednFETandpFET. FormalVerification Formalverificationinvolvesamathematicalprooftoshowthatadesignadherestoaproperty FullyDepletedSiliconOnInsulator(FD-SOI) FD-SOIisasemiconductorsubstratematerialwithlowercurrentleakagecomparedthanbulkCMOS. FunctionalCoverage Coveragemetricusedtoindicateprogressinverifyingfunctionality FunctionalDesignandVerification FunctionalDesignandVerificationiscurrentlyassociatedwithalldesignandverificationfunctionsperformedbeforeRTLsynthesis. FunctionalVerification Functionalverificationisusedtodetermineifadesign,orunitofadesign,conformstoitsspecification. GageR&R,GageRepeatabilityAndReproducibility Astatisticalmethodfordeterminingifatestsystemisproductionreadybymeasuringvariationduringtestforrepeatabilityandreproducibility. GalliumNitride(GaN) GaNisaIII-Vmaterialwithawidebandgap. Gate-All-AroundFET(GAAFET) ApossiblereplacementtransistordesignforfinFETs. Gate-LevelPowerOptimizations Powerreductiontechniquesavailableatthegatelevel. Generation-RecombinationNoise noiserelatedtogeneration-recombination GenerativeAdversarialNetwork(GAN) Aneuralnetworkframeworkthatcangeneratenewdata. Germany Germanyisknownforitsautomotiveindustryandindustrialmachinery. Graphene 2Dformofcarboninahexagonallattice. GraphicsProcessingUnit(GPU) Anelectroniccircuitdesignedtohandlegraphicsandvideo. GuardBanding Addingextracircuitsorsoftwareintoadesigntoensurethatifonepartdoesn'tworktheentiresystemdoesn'tfail. HardIP FullydesignedhardwareIPblock HardwareAssistedVerification Useofspecialpurposehardwaretoaccelerateverification HardwareModeler Historicalsolutionthatusedrealchipsinthesimulationprocess hardware/softwareco-design Optimizingthedesignbyusingasinglelanguagetodescribehardwareandsoftware. HeatDissipation Powercreatesheatandheataffectspower HetNet High-BandwidthMemory(HBM) Adense,stackedversionofmemorywithhigh-speedinterfacesthatcanbeusedinadvancedpackaging. High-LevelSynthesis(HLS) SynthesistechnologythattransformsanuntimedbehavioraldescriptionintoRTL HSAPlatformSystemArchitectureSpecification DefinesasetoffunctionalityandfeaturesforHSAhardware HSAProgrammer’sReferenceManual HSAILVirtualISAandProgrammingModel,CompilerWriter,andObjectFormat(BRIG) HSARuntimeProgrammer’sReferenceManual RuntimecapabilitiesfortheHSAarchitecture HybridCloud Combinesuseofapubliccloudservicewithaprivatecloud,suchasacompany'sinternalenterpriseserversordatacenters. HyperscaleDataCenters Adatacenterfacilityownedbythecompanythatofferscloudservicesthroughthatdatacenter. I/Oenablingtechnology ICTypes Whatarethetypesofintegratedcircuits? IEEE1076-VHSICHWDescriptionLanguage HardwareDescriptionLanguage IEEE1076.1-Analog&Mixed-Signal AnalogextensionstoVHDL IEEE1076.1.1-VHDL-AMSStandardPackages AcollectionofVHDL1076.1packages IEEE1076.4-VHDLSynthesisPackage–FloatingPoint Modelingofmacro-cellsinVHDL IEEE1149BoundaryScanTest BoundryScanTest IEEE1364-Verilog IEEEratifiedversionofVerilog IEEE1364.1-VerilogRTLSynthesis StandardforVerilogRegisterTransferLevelSynthesis IEEE1532-in-systemprogrammability(ISP) Extensionto1149.1forcomplexdeviceprogramming IEEE1647-FunctionalVerificationLanguagee Functionalverificationlanguage IEEE1666-StandardSystemC SystemC IEEE1685-IP-XACT StandardforintegrationofIPinSystem-on-Chip IEEE1687-IEEEStandardforAccessandControlofInstrumentationEmbedded IEEEStandardforAccessandControlofInstrumentationEmbeddedwithinaSemiconductorDevice IEEE1800-SystemVerilog IEEEratifiedversionofSystemVerilog IEEE1800.2–UVM UniversalVerificationMethodology IEEE1801-Design/VerificationofLow-Power,Energy-AwareUPF IEEEStandardforDesignandVerificationofLow-PowerIntegratedCircuitsalsoknownbyitsAccelleranameofUnifiedPowerFormat(UPF) IEEE1838:TestAccessArchitecturefor3DStackedIC StandardforTestAccessArchitectureforThree-DimensionalStackedIntegratedCircuits IEEE1850-PropertySpecificationLanguage(PSL) Verificationlanguagebasedonformalspecificationofbehavior IEEE802.1-HigherLayerLANProtocols IEEE802.1isthestandardandworkinggroupforhigherlayerLANprotocols. IEEE802.11-WirelessLAN IEEE802.11workinggroupmanagesthestandardsforwirelesslocalareanetworks(LANs). IEEE802.15-WirelessSpecialtyNetworks(WSN) IEEE802.15istheworkinggroupforWirelessSpecialtyNetworks(WSN),whichareusedinIoT,wearablesandautonomousvehicles. IEEE802.18-RadioRegulatoryTAG "RR-TAG"isatechnicaladvisorygroupsupportingIEEEstandardsgroupsworkingon802.11,802.12,802.16,802.20,802.21,and802.22. IEEE802.19-WirelessCoexistence Standardsforcoexistencebetweenwirelessstandardsofunlicenseddevices. IEEE802.22-WirelessRegionalAreaNetworks Enablesbroadbandwirelessaccessusingcognitiveradiotechnologyandspectrumsharinginwhitespaces. IEEE802.3-Ethernet IEEE802.3-EthernetworkinggroupmanagestheIEEE802.3-Ethernetstandards. IEEEP2415:UnifiedHWAbstraction&LayerforEnergyProportionalElectronicSystems StandardforUnifiedHardwareAbstractionandLayerforEnergyProportionalElectronicSystems IEEEP2416-PowerModeling PowerModelingStandardforEnablingSystemLevelAnalysis IIoT:IndustrialInternetofThings SpecificrequirementsandspecialconsiderationfortheInternetofThingswithinanIndustrialsettiong Impactoflithographyonwafercosts Wafercostsacrossnodes ImplementationPowerOptimizations Poweroptimizationtechniquesforphysicalimplementation In-MemoryComputing Performingfunctionsdirectlyinthefabricofmemory. InducedGateNoise Thermalnoisewithinachannel InstructionSetArchitecture(ISA) Asetofbasicoperationsacomputermustsupport. Insulated-GateBipolarTransistors(IGBT) IGBTsarecombinationsofMOSFETsandbipolartransistors. IntegratedCircuits(ICs) Integrationofmultipledevicesontoasinglepieceofsemiconductor IntegratedDeviceManufacturer(IDM) Asemiconductorcompanythatdesigns,manufactures,andsellsintegratedcircuits(ICs). IntellectualProperty(IP) Adesignorverificationunitthatispre-packedandavailableforlicensing. IntelligentSelf-OrganizingNetworks Networksthatcananalyzeoperatingconditionsandreconfigureinrealtime. InterPartesReview Methodtoascertainthevalidityofoneormoreclaimsofapatent Interconnects(BEOL) Buses,NoCsandotherformsofconnectionbetweenvariouselementsinanintegratedcircuit. InternetofThings(IoT) AlsoknownastheInternetofEverything,orIoE,theInternetofThingsisaglobalapplicationwheredevicescanconnecttoahostofotherdevices,eacheitherprovidingdatafromsensors,orcontainingactuatorsthatcancontrolsomefunction.DatacanbeconsolidatedandprocessedonmassintheCloud. Interposers Fast,low-powerinter-dieconduitsfor2.5Delectricalsignals. InverseLithographyTechnology(ILT) Findingidealshapestouseonaphotomask. IonImplants Injectionofcriticaldopantsduringthesemiconductormanufacturingprocess. IoT&IIoT IP-XACTWorkingGroup StandardforintegrationofIPinSystem-on-Chip IRDrop Thevoltagedropwhencurrentflowsthrougharesistor. ISO26262Terminology TerminologyinISO26262 ISO26262–Functionalsafety Standardrelatedtothesafetyofelectricalandelectronicsystemswithinacar ISO/PAS21448–SOTIF Standardtoensureproperoperationofautomotivesituationalawarenesssystems. ISO/SAEFDIS21434-RoadVehicles—CybersecurityEngineering Astandard(underdevelopment)forautomotivecybersecurity. Israel Issues Koomey’sLaw Theenergyefficiencyofcomputersdoublesroughlyevery18months. Languages Languagesareusedtocreatemodels Laws LayoutversusSchematicChecking(LVS) Deviceandconnectivitycomparisonsbetweenthelayoutandtheschematic LevelShifters Cellsusedtomatchvoltagesacrossvoltageislands Lidar:LightDetectionAndRanging Measuringthedistancetoanobjectwithpulsedlasers. LINbus Lowcostautomotivebus LineEdgeRoughness(LER) Deviationofafeatureedgefromidealshape. Lint Removalofnon-portableorsuspiciouscode LithoEtchLithoEtch(LELE) LELEisaformofdoublepatterning LithoFreezeLithoEtch Atypeofdoublepatterning. Lithography Lightusedtotransferapatternfromaphotomaskontoasubstrate. Lithographyk1coefficient Coefficientrelatedtothedifficultyofthelithographyprocess LogicResizing Correctlysizinglogicelements LogicRestructuring Restructuringoflogicforpowerreduction LogicSimulation Asimulatorisasoftwareprocessusedtoexecuteamodelofhardware LowPower LowPowerMethodologies Methodologiesusedtoreducepowerconsumption. LowPowerVerification Verificationofpowercircuitry Low-PowerDesign LVDS(low-voltagedifferentialsignaling) Atechnicalstandardforelectricalcharacteristicsofalow-powerdifferential,serialcommunicationprotocol. MachineLearning(ML) Anapproachinwhichmachinesaretrainedtofavorbasicbehaviorsandoutcomesratherthanexplicitlyprogrammedtodocertaintasks.Thatresultsinoptimizationofbothhardwareandsoftwaretoachieveapredictablerangeofresults. MagnetoresistiveRAM(MRAM) Usesmagneticpropertiestostoredata Makimoto’sWave Observationrelatedtotheamountofcustomandstandardcontentinelectronics. ManufacturingExecutionSystem(MES) Trackingawaferthroughthefab. ManufacturingNoise Noisesourcesinmanufacturing Materials Semiconductormaterialsenableelectroniccircuitstobeconstructed. Memory Asemiconductordevicecapableofretainingstateinformationforadefinedperiodoftime. MemoryBanking Useofmultiplememorybanksforpowerreduction MEMS MicroelectromechanicalSystemsareafusionofelectricalandmechanicalengineeringandaretypicallyusedforsensorsandforadvancedmicrophonesandevenspeakers. MetalOrganicChemicalVaporDeposition(MOCVD) AkeytoolforLEDproduction. Metamaterials Artificialmaterialscontainingarraysofmetalnanostructuresormega-atoms. Metastability Unstablestatewithinalatch Metcalfe’sLaw Observationthatrelatesnetworkvaluebeingproportionaltothesquareofusers MethodologiesandFlows Describestheprocesstocreateaproduct Metrology Metrologyisthescienceofmeasuringandcharacterizingtinystructuresandmaterials. Microcontroller(MCU) Microprocessor,MicroprocessorUnit(MPU) Theintegratedcircuitthatfirstputacentralprocessingunitononechipofsilicon. Mixed-Signal Theintegrationofanaloganddigital. Models ModelsandAbstractions Modelsareabstractionsofdevices MoldedInterconnectSubstrate(MIS) Amidrangepackagingoptionthatofferslowerdensitythanfan-outs. Monolithic3DChips Awayofstackingtransistorsinsideasinglechipinsteadofapackage. Moore’sLaw ObservationrelatedtothegrowthofsemiconductorsbyGordonMoore. Mote Amoteisamicro-sensor. Multi-Beame-BeamLithography Anadvancedformofe-beamlithography Multi-chipModules(MCM) Anearlyapproachtobundlingmultiplefunctionsintoasinglepackage. Multi-CornerMulti-ModeAnalysis Increasingnumbersofcornerscomplicatesanalysis.Concurrentanalysisholdspromise. Multi-sitetesting Usingatestertotestmultiplediesatthesametime. Multi-Vt Useofmulti-thresholdvoltagedevices MultiplePatterning AwaytoimageICdesignsat20nmandbelow. MXenes Adurableandconductivematerialoftwo-dimensionalinorganiccompoundsinthinatomiclayers. NanoimprintLithography Ahotembossingprocesstypeoflithography. NanosheetFET Atypeoffield-effecttransistorthatuseswiderandthickerwiresthanalateralnanowire. NearThresholdComputing Optimizingpowerbycomputingbelowtheminimumoperatingvoltage. Near-MemoryComputing Movingcomputeclosertomemorytoreduceaccesscosts. NegativeBiasTemperatureInstability(NBTI) NBTIisashiftinthresholdvoltagewithappliedstress. NeuralNetworks Amethodofcollectingdatafromthephysicalworldthatmimicsthehumanbrain. NeuromorphicComputing Acomputearchitecturemodeledonthehumanbrain. Nodes Noise Randomfluctuationsinvoltageorcurrentonasignal. Non-VolatileMemory(NVM) Off-chipcommunications On-chipcommunications One-Time-ProgrammableMemory(OTP) ProgrammableReadOnlyMemory(PROM)andOne-Time-Programmable(OTP)Memorycanbewrittentoonce. OpenSystemsInterconnectionmodel(OSImodel) OSImodeldescribesthemaindatahandoffsinanetwork. OpenVerificationMethodology(OVM) VerificationmethodologycreatedfromURMandAVM OperandIsolation Disablingdatapathcomputationwhennotenabled OpticalInspection Methodusedtofinddefectsonawafer. OpticalLithography OpticalProximityCorrection(OPC) Awaytoimprovewaferprintabilitybymodifyingmaskpatterns. OutsourcedSemiconductorAssemblyandTest(OSAT) CompanieswhoperformICpackagingandtesting-oftenreferredtoasOSAT Overlay Theabilityofalithographyscannertoalignandprintvariouslayersaccuratelyontopofeachother. Packaging Howsemiconductorsgetassembledandpackaged. PAM-4Signaling Ahigh-speedsignalencodingtechnique. PartAverageTesting(PAT) Outlierdetectionforasinglemeasurement,arequirementforautomotiveelectronics. Patents Apatentisanintellectualpropertyrightgrantedtoaninventor Patterning Pellicle Athinmembranethatpreventsaphotomaskfrombeingcontaminated. Phase-ChangeMemory Memorythatstoresinformationintheamorphousandcrystallinephases. Photomask Atemplateofwhatwillbeprintedonawafer. PhotonicIntegratedCircuit(PIC) Photoresist Light-sensitivematerialusedtoformapatternonthesubstrate. PhysicalDesign Designandimplementationofachipthattakesphysicalplacement,routingandartifactsofthoseintoconsideration. PhysicalVaporDeposition(PVD) PVDisadepositionmethodthatinvolveshigh-temperaturevacuumevaporationandsputtering. PhysicalVerification Makingsureadesignlayoutworksasintended. PhysicallyUnclonableFunctions(PUFs) Asetofuniquefeaturesthatcanbebuiltintoachipbutnotcloned. Picocells Asmallcellthatisslightlyhigherinpowerthanafemtocell. PinSwapping Loweringcapacitiveloadsonlogic Planar PODEM AnalgorithmusedATPG PortableStimulus(PSS) HardwareVerificationLanguage,PSSisdefinedbyAccelleraandisusedtomodelverificationintentinsemiconductordesign. PowerConsumption Componentsofpowerconsumption PowerCycleSequencing Powerdomainshutdownandstartup PowerDefinitions Definitionsoftermsrelatedtopower PowerDeliveryNetwork(PDN) Movingpoweraroundadevice. PowerEstimation Howispowerconsumptionestimated PowerGating Reducingpowerbyturningoffpartsofadesign PowerGatingRetention Specialfloporlatchusedtoretainthestateofthecellwhenitsmainpowersupplyisshutoff. PowerIsolation Additionofisolationcellsaroundpowerislands PowerIssues Powerreductionatthearchitecturallevel PowerManagementCoverage Ensuringpowercontrolcircuitryisfullyverified PowerManagementIC(PMIC) Anintegratedcircuitthatmanagesthepowerinanelectronicdeviceormodule,includinganydevicethathasabatterythatgetsrecharged. PowerMOSFETs Apowersemiconductorusedtocontrolandconvertelectricpower. PowerSemiconductors,PowerIC ApowerICisusedasaswitchorrectifierinhighvoltagepowerapplications. PowerSupplyNoise Noisetransmittedthroughthepowerdeliverynetwork PowerSwitching Controllingpowerforpowershutoff PowerTechniques Power-AwareDesign Techniquesthatanalyzeandoptimizepowerinadesign Power-AwareTest Testconsiderationsforlow-powercircuitry PPA(Power,Performance,Area) Fundamentaltradeoffsmadeinsemiconductordesignforpower,performanceandarea. PrintedCircuitBoard(PCB) Thedesign,verification,assemblyandtestofprintedcircuitboards PrivateCloud DatacentersandITinfrastructurefordatastorageandcomputingthatacompanyownsorsubscribestoforuseonlybythatcompany. Process ProcessPowerOptimizations poweroptimizationtechniquesattheprocesslevel ProcessVariation Variabilityinthesemiconductormanufacturingprocess ProcessorUtilization Ameasurementoftheamountoftimeprocessorcore(s)areactivelyinuse. Processors AnintegratedcircuitorpartofanICthatdoeslogicandmathprocessing. PropertySpecificationLanguage Verificationlanguagebasedonformalspecificationofbehavior PublicCloud Datastorageandcomputingdoneinadatacenter,throughaserviceofferedbyacloudserviceprovider,andaccessedonthepublicInternet. QuantumComputing Adifferentwayofprocessingdatausingqubits. RadioFrequencySiliconOnInsulator(RF-SOI) RFSOIistheRFversionofsilicon-on-insulator(SOI)technology. RandomTelegraphNoise Randomtrappingofchargecarriers RapidThermalAnneal(RTA),RapidThermalProcessing(RTP) Theprocessofrapidlyheatingwafers. RareEarthElements Criticalmetalsusedinelectronics. ReadOnlyMemory(ROM) ReadOnlyMemory(ROM)canbereadfrombutcannotbewrittento. RecurrentNeuralNetwork(RNN) Anartificialneuralnetworkthatfindspatternsindatausingotherdatastoredinmemory. RedistributionLayers(RDLs) Coppermetalinterconnectsthatelectricallyconnectonepartofapackagetoanother. RegionalDevelopments/Issues ReliabilityVerification Designverificationthathelpsensuretherobustnessofadesignandreducesusceptibilitytoprematureorcatastrophicelectricalfailures. ReRAMmaterials MaterialsusedtomanufactureReRAMs ResistiveRAM(ReRAM/RRAM) Memoryutilizingresistivehysteresis Reticle Synonymouswithphotomask. RichInteractiveTestDatabase(RITdb) Aproposedtestdatastandardaimedatreducingtheburdenfortestengineersandtestoperations. RISC-V Anopen-sourceISAusedindesigningintegratedcircuitsatlowercost. RootofTrust Trustedenvironmentforsecurefunctions. RTL(RegisterTransferLevel) Anabstractionfordefiningthedigitalportionsofadesign RTLPowerOptimizations OptimizationofpowerconsumptionattheRegisterTransferLevel RTLSignoff AseriesofrequirementsthatmustbemetbeforemovingpasttheRTLphase RVM VerificationmethodologybasedonVera SATSolver Algorithmusedtosolveproblems ScanTest Additionallogicthatconnectsregistersintoashiftregisterorscanchainforincreasedtestefficiency. Scoreboard Mechanismforstoringstimulusintestbench SCVSystemCVerification TestbenchsupportforSystemC Self-AlignedDoublePatterning(SADP) Aformofdoublepatterning. SemiconductorManufacturing Subjectsrelatedtothemanufactureofsemiconductors SemiconductorSecurity Methodsandtechnologiesforkeepingdatasafe. SensorFusion Combininginputfrommultiplesensortypes. Sensors Sensorsareabridgebetweentheanalogworldweliveinandtheunderlyingcommunicationsinfrastructure. serializer/deserializer(SerDes) Atransmissionsystemthatsendssignalsoverahigh-speedconnectionfromatransceiverononechiptoareceiveronanother.Thetransceiverconvertsparalleldataintoserialstreamofdatathatisre-translatedintoparallelonthereceivingend. ShiftLeft Insemiconductordevelopmentflow,tasksonceperformedsequentiallymustnowbedoneconcurrently. ShortChannelEffects Whenchannellengthsarethesameorderofmagnitudeasdepletion-layerwidthsofthesourceanddrain,theycauseanumberofissuesthataffectdesign. ShotNoise Quantizationnoise SideChannelAttacks Aclassofattacksonadeviceanditscontentsbyanalyzinginformationusingdifferentaccessmethods. SiliconCarbide(SiC) Awide-bandgaptechnologyusedforFETsandMOSFETsforpowertransistors. SiliconPhotonics Theintegrationofphotonicdevicesintosilicon Simulation Asimulatorexercisesofmodelofhardware SimulationAcceleration Specialpurposehardwareusedtoacceleratethesimulationprocess. SimultaneousSwitchingNoise Disturbanceingroundvoltage SingletransistorDRAM SingletransistorDRAM SmallCells Wirelesscellsthatfillinthevoidsinwirelessinfrastructure. SoftIP SynthesizableIPblock Software-DrivenVerification Verificationmethodologyutilizingembeddedprocessors Software/HardwareInterfaceforMulticore/Manycore(SHIM)processors Definesanarchitecturedescriptionusefulforsoftwaredesign SPICE CircuitSimulatorfirstdevelopedinthe70s SpikingNeuralNetwork(SNN) Atypeofneuralnetworkthatattemptstomorecloselymodelthebrain. Spin-OrbitTorqueMRAM(SOT-MRAM) AtypeofMRAMwithseparatepathsforwriteandread. SpreadSpectrum Asecuremethodoftransmittingdatawirelessly. StandardEssentialPatent Apatentthathasbeendeemednecessarytoimplementastandard. StandardTestDataFormat(STDF) Themostcommonlyuseddataformatforsemiconductortestinformation. Standards Standardsareimportantinanyindustry. Standards&Laws Startups StaticRandomAccessMemory(SRAM) SRAMisavolatilememorythatdoesnotrequirerefresh StimulusConstraints Constraintsontheinputtoguiderandomgenerationprocess Stochastics,Stochastic-InducedDefects RandomvariablesthatcausedefectsonchipsduringEUVlithography. STT-MRAM AnadvancedtypeofMRAM SubstrateBiasing UseofSubstrateBiasing SubstrateNoise Couplingthroughthesubstrate. Switches Networkswitchesroutedatapackettrafficinsidethenetwork. SynchronousDRAM TypeofDRAMwithfastertransfer SystemInPackage(SiP) AmethodforbundlingmultipleICstoworktogetherasasinglechip. SystemonChip(SoC) Asystemonchip(SoC)istheintegrationoffunctionsnecessarytoimplementanelectronicsystemontoasinglesubstrateandcontainsatleastoneprocessor SystemC AclasslibrarybuiltontopoftheC++languageusedformodelinghardware SystemC-AMS Analogandmixed-signalextensionstoSystemC SystemVerilog Industrystandarddesignandverificationlanguage TensorProcessingUnit(TPU) Google-designedASICprocessingunitformachinelearningthatworkswithTensorFlowecosystem. Testbench Softwareusedtofunctionallyverifyadesign ThermalNoise Noiserelatedtoheat Through-SiliconVias(TSVs) Through-SiliconViasareatechnologytoconnectvariousdieinastackeddieconfiguration. Transistors Basicbuildingblockforbothanaloganddigitalcircuits. TransitionRateBuffering Minimizingswitchingtimes TriplePatterning Amulti-patterningtechniquethatwillberequiredat10nmandbelow. TunnelFET AtypeoftransistorunderdevelopmentthatcouldreplacefinFETsinfutureprocesstechnologies. UL4600–StandardforSafetyfortheEvaluationofAutonomousProducts Standardforsafetyanalysisandevaluationofautonomousvehicles. UnifiedCoverageInteroperabilityStandard(Verification) TheUnifiedCoverageInteroperabilityStandard(UCIS)providesanapplicationprogramminginterface(API)thatenablesthesharingofcoveragedataacrosssoftwaresimulators,hardwareaccelerators,symbolicsimulations,formaltoolsorcustomverificationtools. UnifiedHWAbstraction&LayerforEnergyProportionalElectronicSystems UnifiedPowerFormat(UPF) AccelleraUnifiedPowerFormat(UPF) UniversalVerificationMethodology(UVM) Verificationmethodology URM SystemVerilogversionofeRM UserInterfaces Userinterfacesistheconduitahumanusestocommunicatewithanelectronicsdevice. UtilityPatent Patenttoprotectaninvention Vera HardwareVerificationLanguage Verification VerificationIP(VIP) Apre-packagedsetofcodeusedforverification. VerificationMethodologies Astandardizedwaytoverifyintegratedcircuitdesigns. VerificationPlan Adocumentthatdefineswhatfunctionalverificationisgoingtobeperformed Verilog HardwareDescriptionLanguageinusesince1984 VerilogProceduralInterface ProceduralaccesstoVerilogobjects Verilog-AMS AnalogextensionstoVerilog VHDL HardwareDescriptionLanguage VirtualPrototype Anabstractmodelofahardwaresystemenablingearlysoftwareexecution. VMM VerificationmethodologybuiltbySynopsys Voicecontrol,speechrecognition,voice-userinterface(VUI) Usingvoice/speechfordevicecommandandcontrol. VolatileMemory Memorythatlosesstorageabilitieswhenpowerisremoved. VoltageIslands Useofmultiplevoltagesforpowerreduction VonNeumannArchitecture Thebasicarchitectureformostcomputingtoday,basedontheprinciplethatdataneedstomovebackandforthbetweenaprocessorandmemory. WaferFabTesting Verifyingandtestingthediesonthewaferafterthemanufacturing. WaferInspection(whereyouare) Thescienceoffindingdefectsonasiliconwafer. WideI/O:memoryinterfacestandardfor3DIC 3Dmemoryinterfacestandard Wiredcommunications Wiredcommunication,whichpassesdatathroughwiresbetweendevices,isstillconsideredthemoststableformofcommunication. Wireless Awayofmovingdatawithoutwires. XArchitecture ICinterconnectarchitecture XVerification XPropagationcausesproblems YieldManagementSystem(YMS) Adata-drivensystemformonitoringandimprovingICyieldandreliability. Zero-DayVulnerabilities,Attacks Avulnerabilityinaproduct’shardwareorsoftwarediscoveredbyresearchersorattackersthattheproducingcompanydoesnotknowaboutandthereforedoesnothaveafixforyet. AartdeGeus AdamKablanian AdityaMittal AdnanHamid AdrianSimionescu AhmedHemani AjayDaga AjoyK.Bose AkashDeshpande AkiFujimura AlAkermann AlainFanet AlainJ.Hanover AlakeshChetia AlanScott AlbertoSangiovanni-Vincentelli AlexAlexanian AlexanderSamoylov AlisaYaffa AllanDouglas AmirZarkesh AmitGupta AmitMehrotra AmitNarayan AmitSaxena AmrMohsen An-ChangDeng An-YuKuo AnantAgarwal AndrásPoppe AndreaCasotto AndreasRipp AndreasVeneris AndreiTcherniaev AndrewHughes AndrewT.Yang AndrzejStrojwas AndyChou AndyGoodrich AndyHuang AndyLadd AndyLin AngeAznar AnmolMathur AnupamBakshi ApoSezginer ApostolosLiapist AramMirkazemi AriTakanen ArminBiere ArnaudSchleich ArulSharan ArvindMithal AryehFinegold AsenAsenov AshawnaHailey AshrafTakla AsokeK.Laha AtsushiKasuya AtulBhagat AtulBhatia AurangzebKhan AvidehZakhor AvishaiSilvershatz AxelJantsch BabuChilukuri BadruAgarwala BarryKatz BarryRosales BartDeSmedt BeckyCavanaugh BenChelf BenLevine BendtSorensen BernardVonderschmitt BernieRosenthal BillBerg BillBuckie BillChilds BillHoover BillKrieger BillNeifert BillRobertson BillSommer BimanChattopadhyay BingYeh BobFlatt BobHunter BobQuinn BorgarLjosland BorisGruzman BradQuinton BrianDavenpoort BruceM.Holland BryanHoyer CarsonBradbury CarverMead CésarDouady CharDevich CharlesEdelstenne CharlesEvans CharlesJ.(Chuck)Abronson CharlieCheng CharlieHuang ChengWang ChenmingHu Chi-LaiHuang Ching-ChaoHuang Chioumin(Michael)Chang ChongMing(Frank)Lin ChoukiAktouf ChrisSchalick ChrisWilson ChrisCurry ChrisRosebrugh ChrisRowen ChristianMasson ChristopheAlexandre Chung-KuanCheng ClaesStrannegård ClaudioBasile CleveMoler Clifton(Cliff)Lyons ClintonW.Kelly CobyZelnik ColinHunter CraigHarris CraigHonegger CraigGleason CraigStoops CristianAmitroaie CyrilSpasevski CyrusAfghahi DaChuang DamianSmith DanAbrams DanChapiro DanJaskolski DanMalek DaneshTavana DanielHansson DaveGregory DaveMillman DaveMoffenbeier DavidMarple DavidBotting DavidChyan DavidCoelho DavidE.Long DavidGalloway DavidGreaves DavidHamilton DavidHenke DavidJohannsen DavidNovosel DavidOverhauser DavidPark DavidPellerin DavidR.Stevens DavidStamm DavidStewart DavidYao DavorinMista DawsonEngler DeanDrako DeepakShankar DeepakKumarTala DejanMarkovic DerekKing DevadasVarma DeveshGuatam DianaMarculescu DirkLanneer DominikStrasser DonEmilPezzolo DonMcInnis Don-MinTsou DonaldBennett DougFairbairn DrewE.Wingard DuncanBremner DurgaLakshmiSangisetti EdBlackmond EdmundK.Cheng EdvardSørgård EdwardA.Lee EdwardKomp EdwardN.Evans EginoSarto ElenaPotanina EliYablonovitch EllisSmith EnnoWein EricRyherd EricBeisser EricDormer EricDupont EricDupont-Nivet EricPeers EricT.Hennenhoefer ErikLauwers EsinTerzioglu EunSeiPark EwaldDetjens FadilKotaji Fang-ChengChang Fang-LiYuan FarakhJavid FergusSlorach FiaJohansson FirasMohamed Founder(s)Unknown FrançoisConstant FrancisBernard FrankGennari FrankCosta FrankDeRemer FrankSchenkel FranzDugand FredericReblewski Frederick(Fred)Saal FuadMusa FumiakiSato GabiLeshem GaganHasteer GanapathySubramaniam GeneDancause GeneMarsh GeoffreyTate GeraldH.Langeler GeraldL(Jerry)Frenkil GeraldPechanek GerhardAngst GertGoossens Ghassan(Gus)Y.Yacoub GhislainKaiser GiacintoPaoloSaggese GilWinograd GlenM.Antle GopaPeriyadan GopalKrishnaNayak GordonB.Hoffman GordonBaty GordonE.Moore GrahamHellestrand GrantA.Pierce GregDoyle GregHoeppner GregLloyd GregM.Ordy GregoryRecupero GuidoArnout GünterKeil GuyBois GuydeBurgh HalAlles HalConklin HamidSavoj HaraldNeubauer HardeepGulati HarmArts HarnHuaNg HarveyC.Jonesjr. 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