Wafer fabrication - Wikipedia
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Wafer fabrication is a procedure composed of many repeated sequential processes to produce complete electrical or photonic circuits on semiconductor wafers ... Waferfabrication FromWikipedia,thefreeencyclopedia Jumptonavigation Jumptosearch Thisarticleneedsadditionalcitationsforverification.Pleasehelpimprovethisarticlebyaddingcitationstoreliablesources.Unsourcedmaterialmaybechallengedandremoved.Findsources: "Waferfabrication" – news ·newspapers ·books ·scholar ·JSTOR(September2014)(Learnhowandwhentoremovethistemplatemessage) SimplifiedillustrationoftheprocessoffabricationofaCMOSinverteronp-typesubstrateinsemiconductormicrofabrication.Eachetchstepisdetailedinthefollowingimage.Note:Gate,sourceanddraincontactsarenotnormallyinthesameplaneinrealdevices,andthediagramisnottoscale. Waferfabricationisaprocedurecomposedofmanyrepeatedsequentialprocessestoproducecompleteelectricalorphotoniccircuitsonsemiconductorwafersinsemiconductordevicefabricationprocess.Examplesincludeproductionofradiofrequency(RF)amplifiers,LEDs,opticalcomputercomponents,andmicroprocessorsforcomputers.Waferfabricationisusedtobuildcomponentswiththenecessaryelectricalstructures. Themainprocessbeginswithelectricalengineersdesigningthecircuitanddefiningitsfunctions,andspecifyingthesignals,inputs/outputsandvoltagesneeded.Theseelectricalcircuitspecificationsareenteredintoelectricalcircuitdesignsoftware,suchasSPICE,andthenimportedintocircuitlayoutprograms,whicharesimilartoonesusedforcomputeraideddesign.Thisisnecessaryforthelayerstobedefinedforphotomaskproduction.Theresolutionofthecircuitsincreasesrapidlywitheachstepindesign,asthescaleofthecircuitsatthestartofthedesignprocessisalreadybeingmeasuredinfractionsofmicrometers.Eachstepthusincreasescircuitdensityforagivenarea. Thesiliconwafersstartoutblankandpure.Thecircuitsarebuiltinlayersincleanrooms.First,photoresistpatternsarephoto-maskedinmicrometerdetailontothewafers'surface.Thewafersarethenexposedtoshort-waveultravioletlightandtheunexposedareasarethusetchedawayandcleaned.Hotchemicalvaporsaredepositedontothedesiredzonesandbakedinhighheat,whichpermeatethevaporsintothedesiredzones.Insomecases,ions,suchasO2+orO+,areimplantedinprecisepatternsandataspecificdepthbyusingRF-drivenionsources. Thesestepsareoftenrepeatedmanyhundredsoftimes,dependingonthecomplexityofthedesiredcircuitanditsconnections. Newprocessestoaccomplisheachofthesestepswithbetterresolutionandinimprovedwaysemergeeveryyear,withtheresultofconstantlychangingtechnologyinthewaferfabricationindustry.Newtechnologiesresultindenserpackingofminusculesurfacefeaturessuchastransistorsandmicro-electro-mechanicalsystems(MEMS).ThisincreaseddensitycontinuesthetrendoftencitedasMoore'sLaw. Afabisacommontermforwheretheseprocessesareaccomplished.Oftenthefabisownedbythecompanythatsellsthechips,suchasIntel,TexasInstruments,orFreescale.Afoundryisafabatwhichsemiconductorchipsorwafersarefabricatedtoorderforthirdpartycompaniesthatsellthechip,suchasfabsownedbyTaiwanSemiconductorManufacturingCompany(TSMC),UnitedMicroelectronicsCorporation(UMC),GlobalFoundriesandSemiconductorManufacturingInternationalCorporation(SMIC). In2013thecostofbuildingthenextgenerationwaferfabwasover$10billion.[1] WFEmarket[edit] Referredtorespectivelyasthewaferfabequipment[2]orwaferfrontend[3](equipment)market,bothusingtheacronymWFE,themarketisthatofthemanufacturersofthemachineswhichinturnmanufacturesemiconductors.Theapexresearchlinkin2020identifiedAppliedMaterials,ASML,KLA-Tencor,LamResearch,TELandDainipponScreenManufacturingasmarketparticipants[2]whilethe2019electronicsweekly.comreport,citingTheInformationNetwork’spresidentRobertCastellano,focusedontherespectivemarketsharescommandedbythetwoleaders,AppliedMaterialsandASML.[3] References[edit] ^ShouldanIndianfabuseolderprocess?BusinessStandard,2013 ^abapexresearch,"GlobalWaferFabEquipment(WFE)MarketInsights2019-2025" njmmanews.com,January30,2020.Sampleapexresearchreport(PDF)."Warning:PotentialSecurityRiskAhead"onthenjmmanews.comlinktothe"JesusMartinezfillsinagainstNah-ShonBurrellatBellator108"citationintheNah-ShonBurrellWikipediaarticle;nowarningontheotherlinkstothenjmmanews.comsitehereinthe"Waferfabrication"Wikipediaarticle.Retrieved2020-05-29. ^abManners,David,"Appliedtolosefront-endequipmentcrowntoASML",electronicsweekly.com,26November2019.Retrieved2020-05-29. 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