Eight Major Steps to Semiconductor Fabrication, Part 1
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A wafer, also called a disc, is a thin, glossy slice of a silicon rod that is cut using specific diameters. Most wafers are made of silicon ... SamsungNewsroom'svideoswillnolongerbesupportedonInternetExplorer.Pleasetryadifferenttypeofwebbrowser. close skiptocontent Corporate People&Culture Citizenship Technology Design Other Products Mobile TVs&Displays HomeAppliances NetworkSolutions Semiconductors Other Insights Editorials FeaturedStories PressResources FASTFACTS PressRelease Statements Photos Infographics Videos Menuopen Searchopen Nationchoicepagelink Searchclose Search X Search GalaxyZFlip4GalaxyZFold4BESPOKETheFreestyle Advancedsearch Day Day Anytime Pastweek Pastmonth Pastyear Customrange Sortby Sortby Recent Popular ContentType ContentType All Article PressRelease OK Cancel CLOSE EightMajorStepstoSemiconductorFabrication,Part1:CreatingtheWafer onApril22,2015 Share Shareopen/close Print Shareopen/close Twitter Facebook LinkedIn Tumblr WhatsApp Mail URLcopy URLCopied. Layerclose Althoughanintegratedcircuit(IC),alsoknownasasemiconductorchip,maydeceiveyouwithitsfingernail-sizedformfactor,itisactuallypackedwithbillionsofelectroniccomponents—transistors,diodes,resistors,andcapacitors—whichallworktogethertoperformlogicoperationsandstoredata. So,whatdoesittaketomanufacturethiskindofcircuit,youask? ThetechnologybehindengineeringanICgoesfarbeyondthesimpleassemblingofindividualcomponents.Infact,microscopiccircuitpatternsarebuiltonmultiplelayersofvariousmaterials,andonlyafterthesestepshavebeenrepeatedafewhundredtimesisthechipfinallycomplete. Today,weareintroducinganewseriesthatwillwalkyouthroughtheentiremanufacturingprocessofthisadvanceddevice,fromtherawmaterialstagetothefinaltestingofthesemiconductorchip.Theserieswillconsistofeightpartsandwillbepublishedweekly. Readonforthefirstpartoftheseries,whichintroducesthe“canvas”forintegratedcircuits,otherwiseknownasthesiliconwafer. What’sawafer? Awafer,alsocalledadisc,isathin,glossysliceofasiliconrodthatiscutusingspecificdiameters.Mostwafersaremadeofsiliconextractedfromsand.Themainadvantageofusingsiliconisthatitisrichinsupply,beingthemostabundantelementinnature,justafteroxygen.Itsenvironmentallyfriendlypropertiesareanaddedbonus. Buildinganingot,thefoundationforwafers Oncesiliconisextractedfromsand,itneedstobepurifiedbeforeitcanbeputtouse.First,itisheateduntilitmeltsintoahigh-purityliquidthensolidifiedintoasiliconrod,oringot,usingcommongrowingmethodsliketheCzochralski(chokh-RAL-skee)processortheFloatingZoneprocess. Endscutofffromsiliconrods,oringots ThepopularCzochralskimethodusesasmallpieceofsolidsilicon(seed)whichisplacedinabathofmoltensilicon,orpolycrystallinesilicon,andthenslowlypulledinrotationastheliquidgrowsintoacylindricalingot.Thisiswhythefinishedwafersareallrounddiscs. Givingnewmeaningtotheterm“wafer-thin” Beforeitiscompletelycooled,thecone-shapedendsoftheingotarecutoffwhilethebodyisslicedintothinwafersofuniformthicknesswithsharpdiamondsawblades.Thisexplainswhyaningot’sdiameterwouldultimatelydeterminethesizeofawafer.Intheearlydaysofthesemiconductorindustry,waferswereonlythreeinchesindiameter.Sincethen,wafershavebeengrowinginsize,aslargerwafersresultinmorechipsandhigherproductivity.Thelargestwaferdiameterusedinsemiconductorfabricationtodayis12inches,or300mm. Smoothingthingsout–thelappingandpolishingprocess Slicedwafersneedtobepreppedbeforetheyareproduction-ready.Abrasivechemicalsandmachinespolishtheunevensurfaceofthewaferforamirror-smoothfinish.Theflawlesssurfaceallowsthecircuitpatternstoprintbetteronthewafersurfaceduringthelithographyprocess,whichwewillcoverinalaterposting. Knowyourwafer Eachpartofafinishedwaferhasadifferentnameandfunction.Let’sgooverthemonebyone. 1. Chip:atinypieceofsiliconwithelectroniccircuitpatterns 2. ScribeLines:thin,non-functionalspacesbetweenthefunctionalpieces,whereasawcansafelycutthewaferwithoutdamagingthecircuits 3.TEG(TestElementGroup):aprototypepatternthatrevealstheactualphysicalcharacteristicsofachip(transistors,capacitors,resistors,diodesandcircuits)sothatitcanbetestedtoseewhetheritworksproperly 4. EdgeDie:dies(chips)aroundtheedgeofawaferconsideredproductionloss;largerwaferswouldrelativelyhavelesschiploss 5.FlatZone:oneedgeofawaferthatiscutoffflattohelpidentifythewafer’sorientationandtype Thisbringsustotheendofthefirstpartoftheseries.Wanttoknowwhathappensnext?Then,staytunedforPart2,asSamsungTomorrowwilltakeyouthroughthediscproductionstagebydiscussingtheoxidationprocessofthewafernextweek. InKorean, http://samsungsemiconstory.com/95. TAGSCreatingtheWaferFabricationSemiconductor Products>Semiconductors Foranyissuesrelatedtocustomerservice,pleasegoto CustomerSupportpageforassistance. Formediainquiries,pleaseclickMediaContacttomovetotheform. 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延伸文章資訊
- 1Semiconductor manufacturing processes
Semiconductor manufacturing processes · 1. Cleaning · 2. Film Deposition · 3. Post-deposition Cle...
- 2How a semiconductor wafer is made - USJC
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- 3Wafer Fabrication Data - Analog Devices
The data provided in this calculation is generic data that reflects the overall reliability of th...
- 4A total standard WIP estimation method for wafer fabrication
The production planner and the manufacturing engineer can monitor and control the WIP level and t...
- 5Eight Major Steps to Semiconductor Fabrication, Part 1
A wafer, also called a disc, is a thin, glossy slice of a silicon rod that is cut using specific ...